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CHIPS Incentives Program – Facilities for Semiconductor Materials and Manufacturing Equipment

Agency: National Institute of Standards and Technology

Assistance Listings: 11.037 -- CHIPS Incentives Program

Last Updated: October 16, 2025

The CHIPS Incentives Program aims to catalyze long-term economically sustainable growth in the domestic semiconductor industry in support of U.S. economic and national security. This is the second Notice of Funding Opportunity under this program and seeks applications for projects for the construction, expansion, or modernization of commercial facilities for semiconductor materials and manufacturing equipment.


For more information, additional resources, and instructions on how to apply, please visit chips.gov. Note that all applications must be submitted through the CHIPS Incentives Portal at https://applications.chips.gov. If you have any questions on how to apply, please email apply@chips.gov.


Eligibility

Eligible applicants

Miscellaneous

  • Other

Additional information

An applicant must be a “covered entity” to receive CHIPS Incentives. For purposes of this NOFO, a “covered entity” means a nonprofit entity; a private-sector entity; a consortium of private-sector entities; or a consortium of nonprofit, public, and private-sector entities with a demonstrated ability to substantially finance, construct, expand, or modernize a facility relating to the fabrication, assembly, testing, advanced packaging, production, or research and development of semiconductors, materials used to manufacture semiconductors or semiconductor manufacturing equipment.

Grantor contact information

Description

Misty Roosa Management Analyst

Email

apply@chips.gov

apply@chips.gov

Documents

File nameDescriptionLast updated
CHIPS_-_Facilities_for_Semiconductor_Materials_and_Manufacturing_Equipment_NOFO.pdf
2023-NIST-CHIPS-SMME-01
Sep 27, 2023 08:40 PM UTC
2023-NIST-CHIPS-SMME-01-Amendment.pdf
2023-NIST-CHIPS-SMME-01 Amendment
Oct 16, 2025 08:46 PM UTC

Link to additional information

CHIPS Application Portal

Closing: November 1, 2026

Application process

This site is a work in progress. Go to www.grants.gov to apply, track application status, and subscribe to updates.

Award

$--

Program Funding

--

Expected awards

$--

Award Minimum

$--

Award Maximum

Funding opportunity number:

2023-NIST-CHIPS-SMME-01

Cost sharing or matching requirement:

No

Funding instrument type:

Cooperative agreement

Opportunity Category:

Discretionary

Opportunity Category Explanation:

--

Category of Funding Activity:

Science technology and other research and development

Category Explanation:

--

History

Version:

10

Posted date:

September 29, 2023

Archive date:

December 1, 2026

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